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1

Individual Air-Borne Particle Mass Measurement Using High-Frequency Micromechanical Resonators

Hajjam, Arash, Wilson, James C., Pourkamali, Siavash

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 1.75 MB

english, 2011

2

[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - High frequency thermal-piezoresistive MEMS resonators for detection of organic gases

Hajjam, Arash, Logan, Andrew, Pandiyan, Jagadeesh, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 1.07 MB

english, 2011

3

Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation

Hajjam, Arash, Pourkamali, Siavash

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 8.74 MB

english, 2013

4

Doping-Induced Temperature Compensation of Thermally Actuated High-Frequency Silicon Micromechanical Resonators

Hajjam, Arash, Logan, Andrew, Pourkamali, Siavash

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 794 KB

english, 2012

5

Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors

Hajjam, Arash, Pourkamali, Siavash

Journal:

IEEE Sensors Journal

Year:

2012

Language:

english

File:

PDF, 926 KB

english, 2012

6

[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Fabrication and characterization of miniaturized photo-electro-chemical solar cells

Li, Xin, Rahafrooz, Amir, Pourkamali, Siavash

Year:

2012

Language:

english

File:

PDF, 867 KB

english, 2012

7

[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - Characterization of rotational mode disk resonator quality factors in liquid

Rahafrooz, Amir, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 1.08 MB

english, 2011

8

Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer With Frequency Modulated Output

Kumar, Varun, Mazrouei Sebdani, Saeed, Pourkamali, Siavash

Journal:

Journal of Microelectromechanical Systems

Year:

2017

Language:

english

File:

PDF, 2.15 MB

english, 2017

9

Thin Film Piezoelectric-on-Silicon Elliptical Resonators With Low Liquid Phase Motional Resistances

Mahdavi, Mohammad, Abbasalipour, Amin, Pourkamali, Siavash

Journal:

IEEE Sensors Journal

Year:

2019

Language:

english

File:

PDF, 34 KB

english, 2019

10

Electrically coupled MEMS bandpass filters: Part I: With coupling element

Siavash Pourkamali, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 665 KB

english, 2005

11

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Fabrication and characterization of resonant aerosol particle mass sensors

Hajjam, Arash, Wilson, James C., Rahafrooz, Amir, Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 3.62 MB

english, 2010

12

Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing

Guo, Xiaobo, Yi, Yun-bo, Pourkamali, Siavash

Journal:

IEEE Sensors Journal

Year:

2013

Language:

english

File:

PDF, 1.50 MB

english, 2013

13

[IEEE 2007 IEEE Sensors - Atlanta, GA, USA (2007.10.28-2007.10.31)] 2007 IEEE Sensors - Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers

Pourkamali, Siavash, Ayazi, Farrokh

Year:

2007

Language:

english

File:

PDF, 1.88 MB

english, 2007

14

Electrically coupled MEMS bandpass filters: Part II. Without coupling element

Siavash Pourkamali, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 539 KB

english, 2005

15

Chip-Scale Implementation and Cascade Assembly of Particulate Matter Collectors With Embedded Resonant Mass Balances

Maldonado-Garcia, Maribel, Kumar, Varun, Wilson, James C., Pourkamali, Siavash

Journal:

IEEE Sensors Journal

Year:

2017

Language:

english

File:

PDF, 1.73 MB

english, 2017

16

[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Electrostatic frequency tuning of thermal piezoresistive MEMS resonators

Hajjam, Arash, Rahafrooz, Amir, Pourkamali, Siavash

Year:

2012

Language:

english

File:

PDF, 902 KB

english, 2012

17

[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Nano-precision force and displacement measurements using MEMS resonant structures

Mehdizadeh, Emad, Guo, Xiaobo, Pourkamali, Siavash, Hajjam, Arash, Rahafrooz, Amir

Year:

2013

Language:

english

File:

PDF, 1.19 MB

english, 2013

18

Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization

Hajjam, Arash, Wilson, James C, Rahafrooz, Amir, Pourkamali, Siavash

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 1.51 MB

english, 2010

19

Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring

Mehdizadeh, Emad, Kumar, Varun, Wilson, James C., Pourkamali, Siavash

Journal:

IEEE Sensors Journal

Year:

2017

Language:

english

File:

PDF, 770 KB

english, 2017

20

Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators

Ho, Gavin K, Sundaresan, Krishnakumar, Pourkamali, Siavash, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 2.02 MB

english, 2010

21

[IEEE 2010 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2010.12.6-2010.12.8)] 2010 International Electron Devices Meeting - Fully micromechanical piezo-thermal oscillators

Rahafrooz, Amir, Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 2.47 MB

english, 2010

22

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Self-sustained micromechanical resonant particulate microbalance/counters

Hajjam, Arash, Wilson, James C., Rahafrooz, Amir, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 875 KB

english, 2011

23

[IEEE IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society - Dallas, TX, USA (2014.10.29-2014.11.1)] IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society - Integrated MEMS actuators for sub-Micron patterning on thin polymer films

Mehdizadeh, Emad, Pourkamali, Siavash

Year:

2014

Language:

english

File:

PDF, 1.02 MB

english, 2014

24

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Lorentz force MEMS magnetometer with frequency modulated output

Kumar, Varun, Pourkamali, Siavash

Year:

2016

Language:

english

File:

PDF, 471 KB

english, 2016

25

[IEEE 2010 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2010.12.6-2010.12.8)] 2010 International Electron Devices Meeting - Sub-100ppb/°C temperature stability in thermally actuated high frequency silicon resonators via degenerate phosphorous doping and bias current optimization

Hajjam, Arash, Rahafrooz, Amir, Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 876 KB

english, 2010

26

[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Self-sustained micromechanical resonant pressure sensors

Guo, Xiaobo, Rahafrooz, Amir, Yi, Yun-bo, Pourkamali, Siavash

Year:

2012

Language:

english

File:

PDF, 864 KB

english, 2012

27

[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - Frequency output MEMS resonator on membrane pressure sensors

Qaradaghi, Vahid, Mahdavi, Mohammad, Kumar, Varun, Pourkamali, Siavash

Year:

2016

File:

PDF, 1.67 MB

2016

28

[IEEE 2016 IEEE International Frequency Control Symposium (IFCS) - New Orleans, LA, USA (2016.5.9-2016.5.12)] 2016 IEEE International Frequency Control Symposium (IFCS) - An analog micro-electromechanical XOR

Mahdavi, Mohammad, Ramezany, Alireza, Ravi, Harini, Pourkamali, Siavash

Year:

2016

Language:

english

File:

PDF, 714 KB

english, 2016

29

[IEEE 2018 IEEE International Frequency Control Symposium (IFCS) - Olympic Valley, CA (2018.5.21-2018.5.24)] 2018 IEEE International Frequency Control Symposium (IFCS) - Micro-Resonator-on-Membrane for Real-Time Biosensing

Mahdavi, Mohammad, Wang, Honglei, Abbasalipour, Amin, Hu, Walter, Pourkamali, Siavash

Year:

2018

File:

PDF, 1.58 MB

2018

30

Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: I. Resonator design and modeling

Rahafrooz, Amir, Pourkamali, Siavash

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 1.56 MB

english, 2010

31

[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Direct detection of biomolecules in liquid media using piezoelectric rotational mode disk resonators

Mehdizadeh, Emad, Chapin, Jennifer, Gonzales, Jonathan, Rahafrooz, Amir, Abdolvand, Reza, Purse, Byron, Pourkamali, Siavash

Year:

2012

Language:

english

File:

PDF, 1.75 MB

english, 2012

32

[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - Nano-precision micromachined frequency output profilometer

Abbasalipour, Amin, Mahdavi, Mohammad, Kumar, Varun, Pourkamali, Siavash, Daryadel, Soheil, Minary, Majid

Year:

2016

Language:

english

File:

PDF, 770 KB

english, 2016

33

[IEEE 2018 IEEE International Frequency Control Symposium (IFCS) - Olympic Valley, CA (2018.5.21-2018.5.24)] 2018 IEEE International Frequency Control Symposium (IFCS) - Thermal Piezoresistive Resonant Mass Balance Implemented in a Standard CMOS Process

Abbasalipour, Amin, Kumar, Varun, Ramezany, Alireza, Pourkamali, Siavash

Year:

2018

Language:

english

File:

PDF, 3.57 MB

english, 2018

34

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Thermal actuation, a suitable mechanism for high frequency electromechanical resonators

Rahafrooz, Amir, Hajjam, Arash, Tousifar, Babak, Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 1.84 MB

english, 2010

35

[IEEE 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Rome, Italy (2015.7.27-2015.7.30)] 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Single-mask field emission based tunable MEMS tunneling accelerometer

Kumar, Varun, Xiaobo Guo,, Pourkamali, Siavash

Year:

2015

Language:

english

File:

PDF, 836 KB

english, 2015

36

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Rotational mode disk resonators for high-Q operation in liquid

Rahafrooz, Amir, Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 1012 KB

english, 2010

37

[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - Thin-film piezoelectric-on-silicon particle mass sensors

Harrington, Brandon P., Abdolvand, Reza, Hajjam, Arash, Wilson, James C., Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 1.99 MB

english, 2010

38

Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification

Mehdizadeh, Emad, Kumar, Varun, Pourkamali, Siavash

Journal:

IEEE Electron Device Letters

Year:

2014

Language:

english

File:

PDF, 590 KB

english, 2014

39

[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - MEMS resonant human breath sensors for survivor detection in disaster areas

Hajjam, Arash, Guo, Yedan, Dietrich, Kristine, Pourkamali, Siavash

Year:

2012

Language:

english

File:

PDF, 2.01 MB

english, 2012

40

[IEEE IEEE Custom Integrated Circuits Conference 2006 - San Jose, CA, USA (2006.09.10-2006.09.13)] IEEE Custom Integrated Circuits Conference 2006 - A Low Phase Noise 100MHz Silicon BAW Reference Oscillator

Sundaresan, Krishnakumar, Ho, Gavin, Pourkamali, Siavash, Ayazi, Farrokh

Year:

2006

Language:

english

File:

PDF, 1.73 MB

english, 2006

41

[IEEE 2011 37th IEEE Photovoltaic Specialists Conference (PVSC) - Seattle, WA, USA (2011.06.19-2011.06.24)] 2011 37th IEEE Photovoltaic Specialists Conference - Developing a full cycled silicon cathode-zinc electrolyte based solar cell using copper recovery electrodes

Tousifar, Babak, Douglas, Willy, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 430 KB

english, 2011

42

[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - Fabrication and characterization of MEMS-based resonant organic gas sniffers

Hajjam, Arash, Logan, Andrew, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 1.30 MB

english, 2011

43

Ultra-High Frequency Nanomechanical Piezoresistive Amplifiers for Direct Channel-Selective Receiver Front-Ends

Ramezany, Alireza, Pourkamali, Siavash

Journal:

Year:

2018

Language:

english

File:

PDF, 1.08 MB

english, 2018

44

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - High-Energy Density Micro-Machined Cellular Arrays of Electrostatic Actuators

Abbasalipour, Amin, Palit, Prithviraj, Pourkamali, Siavash

Year:

2019

Language:

english

File:

PDF, 2.37 MB

english, 2019

45

[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - Hydrogen detection using thermally actuated MEMS resonators

Tousifar, Babak, Rahafrooz, Amir, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 1.63 MB

english, 2011

46

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Temperature compensated single-device electromechanical oscillators

Hajjam, Arash, Rahafrooz, Amir, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 825 KB

english, 2011

47

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - MEMS resonant sensors for detection of gasoline vapor

Hajjam, Arash, Pandiyan, Jagadeesh, Rahafrooz, Amir, Pourkamali, Siavash

Year:

2010

Language:

english

File:

PDF, 1.45 MB

english, 2010

48

[IEEE 2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA (2006.06.11-2006.06.16)] 2006 IEEE MTT-S International Microwave Symposium Digest - High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters

Ayazi, Farrokh, Pourkamali, Siavash, Ho, Gavin, Abdolvand, Reza

Year:

2006

Language:

english

File:

PDF, 4.16 MB

english, 2006

49

[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - High-Q Lorentz force MEMS magnetometer with internal self-amplification

Mehdizadeh, Emad, Kumar, Varun, Guo, Xiaobo, Pourkamali, Siavash

Year:

2014

Language:

english

File:

PDF, 1.98 MB

english, 2014

50

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures

Rahafrooz, Amir, Pourkamali, Siavash

Year:

2011

Language:

english

File:

PDF, 1.61 MB

english, 2011

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